Automatic positive pressure seal access door

Details Automatic positive pressure seal access door Automatic positive pressure seal access door

1997-07-11

1998-11-17

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Chamber seal

414217, C23C 1600

Patent

active

058370595

ABSTRACT:
A novel automatic vertical-slide door assembly for a supply chamber, and a substrate-processing apparatus incorporating such a door assembly for sealing engagement in the presence of either negative or positive pressure, such as atmospheric pressure, within the supply chambers or load locks and the central transfer station. The present door assemblies are relatively thin and vertically movable to fully cover and uncover the access port or opening to the load lock chamber, and a section thereof is also horizontally-movable a slight distance into compression against the face surface of the load lock to seal the load lock against leakage of either positive or negative pressure, while avoiding any frictional sliding contact with the face surface of the load lock or with the sealing gasket surrounding the access port or opening thereto during vertical operation thereof.

REFERENCES:
patent: 5013385 (1991-05-01), Maher et al.
patent: 5186594 (1993-02-01), Toshima et al.
patent: 5512320 (1996-04-01), Turner et al.
patent: 5607276 (1997-03-01), Muka et al.

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