4. Coating apparatus
  5. Gas or vapor deposition
  6. Chamber seal
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Cap-mounting mechanism for apparatus for thermal treatment of se

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Chamber for chemical vapor deposition

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Closure for thermal reactor

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Compliant wafer chuck

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Continuous vacuum vapor deposition system having reduced pressur

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Cooling element for a semiconductor fabrication chamber

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Cylinder-based plasma processing system

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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