4. Coating apparatus
  5. Gas or vapor deposition
  6. Chamber seal
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Sealable surface method and device

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Sealing apparatus

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Sealing apparatus for continuous vacuum treating equipment

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Sealing apparatus for vacuum treatment of support for light-sens

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Slit valve door

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Slit valve door seal

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Solid film growth apparatus

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Support and seal structure for CCVD reactor

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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