Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate
2006-04-11
2006-04-11
Lund, Jeffrie R. (Department: 1763)
Coating apparatus
Gas or vapor deposition
Chamber seal
C118S718000, C118S724000, C427S248100, C427S255240
Reexamination Certificate
active
07025833
ABSTRACT:
A chill drum (14) is modified to improve heat transfert between the drum and a flexible web substrate (20) disposed around the drum. The drum surface (22) contains a series of passages (44) and distribution holes (46). A working gas is injected into these passages and flows out of the distribution holes into the space between the web and drum. A cover (32) prevents working gas from escaping from frum passages in the area not covered by the web, and supplies the working gas to the passages at the drum cover. Once gas is in the passages, leakage only occurs from the edges of the web. The pressure in the passages remains essentially constant around the drum, producing uniform elevated pressures under the entire web. Elevated pressure behind the web significantly improves overall heat transfert, thereby allowing higher deposition rates and other process advantages.
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Applied Process Technologies, Inc.
Cahill von Hellens & Glazer, P.L.C.
Lund Jeffrie R.
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