Device for sputtering a metallic material on a plate
Device for targeted application of deposition material to a...
Device for the regulation of a plasma impedance
Diamond crystal forming method
Dielectric material used for an ozone generator and a method of
Dielectric processing with included stabilization periods
Dielectric thin film and thin-film EL device using same
Dielectric-layer-coated substrate and installation for...
Differential copper deposition on integrated circuit surfaces an
Diffusion coating applied by magnetron sputtering
Diffusion enhanced ion plating for copper fill
Direct current sputtering of boron from boron/coron mixtures
Discrete track media produced by underlayer laser ablation
Distributed-array magnetron-plasma processing module and method
Double-layer shutter control method of multi-sputtering system
Double-sided reflector films
Dry etching and mirror deposition processes for silicone...
Dry etching apparatus and method
Dual cathode arrangement for physical vapor deposition of...
Dual chamber ion beam sputter deposition system