Diamond crystal forming method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Patent

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Details

20419216, 20419212, 423446, 117108, 117929, C23C 1434, C01B 3106, C30B 2904

Patent

active

056075600

ABSTRACT:
A diamond crystal forming method with which a diamond crystal is formed on a substrate by a sputtering process uses high-frequency energy in the frequency range of 40 MHz to 250 MHz to form plasma.

REFERENCES:
patent: 4597844 (1986-07-01), Hiraki et al.
patent: 4767517 (1988-08-01), Hiraki et al.
patent: 4824546 (1989-04-01), Ohmi
patent: 5073241 (1991-12-01), Watanabe

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