Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1995-10-10
1997-03-04
Breneman, R. Bruce
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419216, 20419212, 423446, 117108, 117929, C23C 1434, C01B 3106, C30B 2904
Patent
active
056075600
ABSTRACT:
A diamond crystal forming method with which a diamond crystal is formed on a substrate by a sputtering process uses high-frequency energy in the frequency range of 40 MHz to 250 MHz to form plasma.
REFERENCES:
patent: 4597844 (1986-07-01), Hiraki et al.
patent: 4767517 (1988-08-01), Hiraki et al.
patent: 4824546 (1989-04-01), Ohmi
patent: 5073241 (1991-12-01), Watanabe
Hirabayashi Keiji
Yamagami Atsushi
Breneman R. Bruce
Canon Kabushiki Kaisha
McDonald Rodney G.
LandOfFree
Diamond crystal forming method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Diamond crystal forming method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Diamond crystal forming method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2143686