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Method for sputter depositing thin films

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for sputter deposition of a chromium, carbon and fluorine

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for sputtering a hydrogen-doped carbon protective film on

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for sputtering compounds on a substrate

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for sputtering multi-component thin-film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for sputtering tini shape-memory alloys

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for successive formation of thin films

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for tantalum pentoxide moisture barrier in film...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for the application of a scratch protection layer and an

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for the fabrication of an implantable electrode

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for the manufacture of coatings and an article

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for the manufacture of electronic components

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for the production of a titanium/titanium nitride double

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for the production of substrates, magnetron source...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of an apparatus for sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of and apparatus for forming a metal interconnection in t

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of and apparatus for processing a workpiece in plasma

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of and apparatus for restoring a support surface in a sem

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of applying a coating by physical vapor deposition

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of applying a coating to a metallic article and an...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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