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Magnetron sputter device using the same pole piece for coupling

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Magnetron sputter etching system

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputter gun target assembly with distributed magnetic

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputter source

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Magnetron sputter-pulsed laser deposition system and method

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Statutory Invention Registration

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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Magnetron sputtering apparatus and mask

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus and sputtering gun for use in the

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus for single substrate processing

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering cathode

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering cathode apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering cathode assembly and magnet assembly theref

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering cathode for vacuum coating apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering cathode for vacuum coating apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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