Etching of copper and copper bearing alloys

Etching of copper-containing devices

Etching of dielectric layers with electrons in the presence of s

Etching of materials in a noncorrosive environment

Etching of multiple holes of uniform size

Etching of optical fibers

Etching of silicon dioxide selectively to silicon nitride and po

Etching of tantalum silicide/doped polysilicon structures

Etching of titanium

Etching of vacuum metallized indium

Etching process for films of aluminum or its alloys

Etching process for improving the strength of a laser-machined s

Etching process for zirconium metallic objects

Etching process of silicon material

Etching process utilizing the same positive photoresist layer fo

Etching process with vibrationally excited SF.sub.6

Etching processes for avoiding edge stress in semiconductor chip

Etching rate determining method and apparatus

Etching solution and etching method for semiconductors

Etching solution and etching method for semiconductors and metho