Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1991-09-11
1993-05-04
Hearn, Brian E.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156643, 156646, 156652, 156665, 437194, 437190, 437197, H01L 2100
Patent
active
052078680
ABSTRACT:
A process for etching an aluminum-based film disposed on a substrate is disclosed in which two specific different gases are used. One contains a hydrogen-donating gas in a volume of 10 to 99% and serves to etch and pattern the film until the substrate exposes to view, and the other is an oxidation-imparting gas for use in protecting the resulting pattern at its side walls. Over etching is attained without pattern defects.
REFERENCES:
patent: 4148705 (1979-04-01), Battey et al.
patent: 4511429 (1985-04-01), Mizutani et al.
Goudreau George
Hearn Brian E.
Sony Corporation
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