Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1984-07-16
1985-11-19
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
29569L, 156656, 1566591, 350 9612, C23F 102, B44C 122, C03C 1500, C03C 2506
Patent
active
045540500
ABSTRACT:
The specification describes a technique for etching titanium using EDTA compounds. It is especially useful for selective etch processes such as those used to form titanium diffused waveguides in lithium niobate crystals.
REFERENCES:
patent: 4080244 (1978-03-01), Auracher et al.
Minford William J.
Murphy Edmond J.
Rice Trudie C.
AT&T Bell Laboratories
Powell William A.
Wilde Peter V. D.
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