Etching of multiple holes of uniform size

Details Etching of multiple holes of uniform size Etching of multiple holes of uniform size

1979-06-29

1980-12-16

Massie, Jerome W.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156654, H01L 21306

Patent

active

042395860

ABSTRACT:
Uniform holes with a diameter of the order of 1 micrometer or larger can be formed by an etching operation which employs the combination properties of the surface tension of the etch coupled with a force on the meniscus of the etch in the hole to cause the etching to stop when one hole reaches the proper size and to permit the etching to continue on all other holes until they reach the same size.

REFERENCES:
patent: 3645811 (1972-02-01), Davies et al.
patent: 3666579 (1972-05-01), Dietch
patent: 3724066 (1973-04-01), Wainer et al.
patent: 3770533 (1973-11-01), Zwicker
patent: 3921916 (1975-11-01), Bassous
patent: 4007464 (1977-02-01), Bassous et al.
patent: 4021278 (1977-05-01), Hood et al.
patent: 4066491 (1978-01-01), Ruh et al.
patent: 4155775 (1979-05-01), Alpaugh et al.
Brunsch et al., "Etching . . .-Hales", IBM Technical Disclosure Bulletin, vol. 19, No. 8, (1/77), pp. 3085-3086.

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