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Use of multilayer amorphous carbon ARC stack to eliminate...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Use of multiple etching steps to reduce lateral etch undercut

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Use of nanoscale particles for creating scratch-resistant...

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Encapsulating
Reexamination Certificate

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Use of nitrides for flip-chip encapsulation

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Use of nitrides for flip-chip encapsulation

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Use of optimized film stacks for increasing absorption for...

Semiconductor device manufacturing: process – Repair or restoration
Reexamination Certificate

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Use of organic spin on materials as a stop-layer for local...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Use of oxalyl chloride to form chloride-doped silicon dioxide fi

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Patent

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Use of palladium in IC manufacturing

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Use of palladium in IC manufacturing

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Assembly of plural semiconductive substrates each possessing...
Patent

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Use of palladium in IC manufacturing with conductive polymer...

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Assembly of plural semiconductive substrates each possessing...
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Use of palladium in IC manufacturing with conductive polymer...

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Including adhesive bonding step
Reexamination Certificate

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Use of PE-SiON or PE-Oxide for contact or via photo and for...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Use of PE-SiON or PE-OXIDE for contact or via photo and for...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Use of phoslon (PNO) for borderless contact fabrication,...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Use of photoresist focus exposure matrix array as via etch...

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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Use of photoresist in substrate vias during backside grind

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Use of poly resistor implant to dope poly gates

Semiconductor device manufacturing: process – Making field effect device having pair of active regions...
Reexamination Certificate

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Use of polybenzoxazoles (PBOS) for adhesion

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Including adhesive bonding step
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Use of polymer spacers for the fabrication of shallow trench iso

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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