Use of nanoscale particles for creating scratch-resistant...

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Encapsulating

Reexamination Certificate

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C257S789000, C257S795000, C257SE21502

Reexamination Certificate

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07598126

ABSTRACT:
Inorganic-based nanoparticles, such as nanoparticles based on silicon dioxide, are used in order to produce protective layers for semiconductor chips having scratch-resistant properties. The nanoparticles are preferably processed to form a sol, which is applied onto the semiconductor chips to be coated and subsequently converted by sintering into the protective layer.

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H.-Q. Nguyen et al., “Thermische Aufbringung neuartiger Korrosionsschichten für Leichtmetalle auf der Basis oxidischer Nanopartikel,” Karl-Winnacker-Institu der Dechema e.V., Franfurt am Main, Jan. 2004, with English translation of citation.

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