Oxygen ion implantation procedure to increase the surface area o
Oxygen plasma reduction to eliminate precursor overflow in...
Oxygen plasma treatment for enhanced HDP-CVD gapfill
Oxygen plasma treatment for nitride surface to reduce photo...
Oxygen-doped Al-containing current blocking layers in active...
Oxygen-doped in-situ doped amorphous silicon multilayer gate str
Oxygen-free, dry plasma process for polymer removal
Oxygen-rich layers underlying BPSG
Oxynitride bilayer formed using a precursor inducing a high...
Oxynitride GTE dielectrics using NH.sub.3 gas
Oxynitride laminate “blocking layer” for thin...
Oxynitride shallow trench isolation and method of formation
Ozonated DI water process for organic residue and metal...
Ozone treatment method and ozone treatment apparatus
Ozone treatment of a ground semiconductor die to improve...
Ozone vapor clean method
Ozone-enhanced oxidation for high-k dielectric semiconductor...
Ozone-teos method for forming with attenuated surface...