Limiting hydrogen ion diffusion using multiple layers of...
Line edge roughness reduction
Line edge roughness reduction
Line edge roughness reduction for trench etch
Line element and method of manufacturing the line element
Line monitoring of negative bias temperature instabilities...
Line width calibration standard manufacturing and certifying...
Line-to-line reliability enhancement using a dielectric...
Line-to-line reliability enhancement using a dielectric...
Linear capacitor and process for making same
Linear CMP tool design using in-situ slurry distribution and...
Linear CMP tool design with closed loop slurry distribution
Linear pin photodiode
Liner for semiconductor memories and manufacturing method...
Liner for tungsten/silicon dioxide interface in memory
Liner protection in deep trench etching
Liner with poor step coverage to improve contact resistance...
Linerless shallow trench isolation method
Linewidth control apparatus and method
Linewidth metrology of integrated circuit structures