IMD scheme by post-plasma treatment of FSG and TEOS oxide...
IMP TiN barrier metal process
Impact ionization MOSFET method
Impact-free wire bonding of microelectronic devices
Implant damage control by in-situ C doping during SiGe...
Implant damage removal by laser thermal annealing
Implant enhancement of titanium silicidation
Implant method for forming Si3N4 spacer
Implant method to improve characteristics of high voltage...
Implant N2 into a pad oxide film to mask the active region...
Implant optimization scheme
Implant process utilizing as an implant mask, spacers projecting
Implant screen and method
Implant sequence for multi-function semiconductor structure...
Implantation at elevated temperatures for amorphization...
Implantation into high-K dielectric material after gate etch...
Implantation method
Implantation method for reducing threshold voltage for...
Implantation method for simultaneously implanting in one...
Implantation of deuterium in MOS and DRAM devices