Pre-release plastic packaging of MEMS and IMEMS devices
Precisely defined microelectromechanical structures and...
Preloaded linear beam vibration sensor and its manufacturing met
Pressure responsive device and method of manufacturing...
Pressure sensor and manufacturing method therefor
Pressure sensor method of fabrication
Pressure transducer and manufacturing method thereof
Pressure transducer with composite diaphragm
Process for a monolithically-integrated micromachined sensor...
Process for bonding a shell to a substrate for packaging a semic
Process for depositing a surface-wide layer through a mask and o
Process for fabricating micromechanical devices
Process for fabricating single crystal resonant devices that...
Process for fabricating single crystal resonant devices that...
Process for fabrication of 3-dimensional micromechanisms
Process for integrating dielectric optical coatings into...
Process for integrating dielectric optical coatings into...
Process for making a magnetoresistive magnetic sensor and sensor
Process for manufacture of microoptomechanical structures
Process for manufacturing a micromachined oscillating...