Process for making a magnetoresistive magnetic sensor and sensor

Details Process for making a magnetoresistive magnetic sensor and sensor Process for making a magnetoresistive magnetic sensor and sensor

1997-10-09

2000-08-15

Mulpuri, Savitri

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

438702, H01L 2100

Patent

active

061035459

ABSTRACT:
Process for manufacturing a magnetoresistive magnetic sensor using in magnetometry and a sensor obtained using this process. According to the invention, the sensor comprises two concentrator guides (32, 34) embedded in a substrate (20). The inclined flanks of these guides correspond to the crystallographic planes of the substrate (20). The magnetoresistance (40) is placed on the substrate (20) between guides (32, 34).

REFERENCES:
patent: 5260653 (1993-11-01), Smith et al.
patent: 5483735 (1996-01-01), Postma et al.

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