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Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into...

DC electric field assisted anneal

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant

Deep-trench capacitor with hemispherical grain silicon...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region

Defect-free junction formation using laser melt annealing of...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region

Defined sacrifical region via ion implantation for...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – By application of corpuscular or electromagnetic radiation

Deposition of dopant impurities and pulsed energy drive-in

Reissue Patent

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – By application of corpuscular or electromagnetic radiation

Deposition of dopant impurities and pulsed energy drive-in

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant

Deposition of titanium oxide film containing droping element...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant

Deuterium doping for hot carrier reliability improvement

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region

Device improvement by source to drain resistance lowering throug

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region

Device isolation structure of a semiconductor device and...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant

Diffusing dopants into a semiconductor wafer

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region

Diffusion barrier for polysilicon gate electrode of MOS device i

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant

Diffusion stop implants to suppress as punch-through in SiGe

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma

Direct gas-phase doping of semiconductor wafers using an organic

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma

Direct gas-phase doping of semiconductor wafers using an organic

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma

Direct gas-phase doping of semiconductor wafers using an organic

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region

Dopant activation anneal to achieve less dopant diffusion...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into...

Dopant interface formation

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant

Doped silicon deposition process in resistively heated...