High temperature local oxidation of silicon for fine line patter
Implant N2 into a pad oxide film to mask the active region...
Implanted isolation structure formation for high density CMOS in
In situ hardmask pullback using an in situ plasma resist...
In situ hardmask pullback using an in situ plasma resist...
Integrated circuit and method
Integrated circuit device isolating methods including silicon sp
Integrated circuit fabrication
Integrated circuit fabrication process
Integrated circuit having an interlevel interconnect coupled to
Integrated circuit isolation system
Integrated circuitry, methods of fabricating integrated...
Ion implant of the moat encroachment region of a LOCOS field iso
Isolated structure and method of fabricating such a...
Isolation method of semiconductor device using second pad oxide
Isolation region bird's beak suppression
Isolation technology for submicron semiconductor devices
Laser based method and device for forming spacer structures...
Local oxidation of silicon (LOCOS) method employing graded...
Localized strained semiconductor on insulator