Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Recessed oxide by localized oxidation
Reexamination Certificate
2001-04-03
2002-09-03
Mai, Son L. (Department: 2818)
Semiconductor device manufacturing: process
Formation of electrically isolated lateral semiconductive...
Recessed oxide by localized oxidation
C438S553000
Reexamination Certificate
active
06444542
ABSTRACT:
BACKGROUND OF THE INVENTION
(a) Field of the Invention
The invention relates to electronic semiconductor devices, and, more particularly, to capacitor and memory structures and fabrication methods for such structures.
(b) Description of the Related Art
High density integrated circuit memories have density dominated by cell size; thus alternative capacitor dielectrics such as high dielectric constant para-electrics for dynamic memory (DRAM) and ferroelectrics for nonvolatile ferroelectric memory (FeRAM) have recently received intense investigation. The para-electrics currently being investigated include barium strontium titanate (BST) and tantalum pentoxide (Ta2O5) and the ferroelectrics include strontium bismuth tantalate (SBT) and lead zirconate titanate (PZT). See for example, Hintermaier et al, Properties of SrBi
2
Ta
2
O
5
Thin Films Grown by MOCVD for High Density FeRAM, 1998 Symp. VLSl Tech. Dig. 56.
However, memories with these new dielectrics have manufacturing problems.
SUMMARY OF THE INVENTION
The present invention provides fabrication for paraelectric and ferroelectric capacitors, and includes multi-step stack etches with remote endpoint detection for step transitions.
This has the advantages of manufacturability for paraelectric and ferroelectric capacitors with metal oxide dielectrics such as PZT, BST, and SBT.
REFERENCES:
patent: 5591302 (1997-01-01), Shinohara et al.
patent: 5930639 (1999-07-01), Schuele et al.
patent: 6074943 (2000-06-01), Brennan et al.
patent: 6171970 (2001-01-01), Xing et al.
patent: 6211035 (2001-04-01), Moise et al.
Celii Francis
Colombo Luigi
Gaynor Justin F.
Gilbert Stephen R.
Moise Theodore S.
Brady W. James
Hoel Carlton H.
Mai Son L.
Nhu David
Telecky , Jr. Frederick J.
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