Advanced isolation process for large memory arrays
Amorphizing ion implant local oxidation of silicon (LOCOS)...
Atomic layer deposited HfSiON dielectric films wherein each...
Birdsbeak encroachment using combination of wet and dry etch for
Bulk and strained silicon on insulator using local selective...
Channel stop implant profile shaping scheme for field isolation
Cleaning of photolithography masks
CVD flowable gap fill
Device isolation method of semiconductor device
Device isolation technology
Device structures including backside contacts, and methods...
Dual-masked field isolation
Dual-masked isolation
Edge polysilicon buffer LOCOS isolation
Encroachless LOCOS isolation
Epitaxial growth method
Field oxide formation by oxidation of polysilicon layer
Field-effect transistor with a trench isolation structure and a
Flash memory device isolation method and structure
Growth of photoresist layer in photolithographic process