Integrated circuit fabrication

Details Integrated circuit fabrication Integrated circuit fabrication

1997-09-05

2000-06-13

Dang, Trung

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Recessed oxide by localized oxidation

438449, 438450, 438452, H01L 2176

Patent

active

060749334

ABSTRACT:
Undesirable birds beak pull back due to ion implant damage is alleviated by additional oxide growth.

REFERENCES:
patent: 5599730 (1997-02-01), Lee et al.
patent: 5607543 (1997-03-01), Eisenberg et al.
patent: 5650350 (1997-07-01), Dennison et al.

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