Laser based method and device for forming spacer structures...
Local oxidation of silicon (LOCOS) method employing graded...
Localized strained semiconductor on insulator
LOCOS field oxide and field oxide process using silicon nitride
Locos isolation process using a layered pad nitride and dry fiel
Locos method with double polysilicon/silicon nitride spacer
Locos with bird's beak suppression by a nitrogen implantation
Locus isolation technique using high pressure oxidation (hipox)