Semiconductor structure and method of manufacture
Semiconductor structures for suppressing gate oxide plasma...
Semiconductor trench isolation process resulting in a silicon me
Semiconductor trench isolation structure formed substantially wi
Semiconductor trench isolation with improved planarization metho
Sequential deposition process for gap filling
Shallow trench filled with two or more dielectrics for...
Shallow trench filled with two or more dielectrics for...
Shallow trench filled with two or more dielectrics for...
Shallow trench isolation
Shallow trench isolation
Shallow trench isolation
Shallow trench isolation (STI) and method of forming the same
Shallow trench isolation (STI) fabrication method for semiconduc
Shallow trench isolation (STI) method employing gap filling sili
Shallow trench isolation (STI) method with reproducible...
Shallow trench isolation (STI) module to improve contact...
Shallow trench isolation (STI) region with high-K liner and...
Shallow trench isolation (STI) with bilayer of oxide-nitride for
Shallow trench isolation (STI) with trench liner of...