Shallow trench isolation using UV/O3 passivation prior to...
Shallow trench isolation with oxide-nitride/oxynitride liner
Shallow trench isolator via non-critical chemical mechanical...
Silicon buffered shallow trench isolation
Silicon corner rounding in shallow trench isolation process
Silicon nitride capped shallow trench isolation method for...
Silicon nitride capped shallow trench isolation method for...
Silicon nitride hardstop encapsulation layer for STI region
Silicon shallow trench etching with round top corner by...
Silicon strain engineering accomplished via use of specific...
Silicon-enriched shallow trench oxide for reduced recess during
Silicon-on-insulator (SOI) transistor having partial hetero...
Silicon-ozone CVD with reduced pattern loading using...
Simplified method to reduce or eliminate STI oxide divots
Simplified shallow trench isolation formation with no polish sto
Soft edge induced local oxidation of silicon
Spin coating for maximum fill characteristic yielding a...
Spin coating for maximum fill characteristic yielding a...
SRAM cell having stepped boundary regions and methods of...
STI film property using SOD post-treatment