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Polysilicon gate having a metal plug, for reduced gate resistanc

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Polysilicon polish for patterning improvement

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Post etch silicide formation using dielectric etchback after glo

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Post thermal treatment methods of forming high dielectric...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Post-spacer etch surface treatment for improved silicide...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Predefined critical spaces in IC patterning to reduce line...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Preparation of high-k nitride silicate layers by cyclic...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Preparation of stack high-K gate dielectrics with nitrided...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Preventing cavitation in high aspect ratio dielectric...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Prevention of abnormal WSi.sub.x oxidation by in-situ amorphous

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Process flow to reduce spacer undercut phenomena

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Process for breaking silicide stringers extending between...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Process for building borderless bitline, wordline amd DRAM...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Process for defining the width of silicon gates using spacers as

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Process for device fabrication in which a thin layer of cobalt s

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Process for fabricating a floating gate of a flash memory in...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Process for fabricating a self-aligned contact

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Process for fabricating a semiconductor device component...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Process for fabricating an electronic integrated circuit and...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Process for fabricating an ONO structure

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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