Masking without photolithography during the formation of a...

Material and method for forming low-dielectric-constant film

Material for forming silica based film

Material of forming silicon oxide film, silicon oxide film, meth

Material of photoresist protect oxide

Materials and methods for forming hybrid organic-inorganic...

Mechanical enhancement of dense and porous organosilicate...

Mechanical enhancement of dense and porous organosilicate...

Mechanically reinforced highly porous low dielectric...

MEMS device polymer film deposition process

Mesoporous silica films with mobile ion gettering and...

Metal gate trim process by using self assembled monolayers

Metal organic chemical vapor deposition apparatus and deposition

Metal thin film and semiconductor comprising a metal thin film

Metal thin film and semiconductor comprising a metal thin film

Metal-free catalysts for pulsed deposition layer process for...

Metal-organic (MO) chemical vapor deposition method and MO...

Method and apparatus for an increased throughput furnace...

Method and apparatus for controlling coating thickness

Method and apparatus for depositing a thin film, and...