C x H y sacrificial layer for cu/low-k interconnects
C x H y sacrificial layer for cu/low-k interconnects
Capacitor with hafnium, lanthanum and oxygen mixed...
Capacitors and methods with praseodymium oxide insulators
Carbon and halogen doped silicate glass dielectric layer and...
Carbon doped oxide deposition
Carbon nanotube device and process for manufacturing same
Carbon nanotube device, method of manufacturing the same,...
Carbon nanotube growth
Catalytic deposition method for a semiconductor surface...
Charged particle deposition of electrically insulating films
Chemical mechanical electropolishing system
Chemical treatment of semiconductor substrates
Chemical treatment of semiconductor substrates
Chemical treatment of semiconductor substrates
Chemical vapor deposition of high quality flow-like silicon...
Chemical vapor deposition of TiN films in a batch reactor
Chemical vapor deposition using organometallic precursors
Chemically and electrically stabilized polymer films
Cleaning water for cleaning a wafer and method of cleaning a...