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Methods to form electronic devices

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Micromechanical component and suitable method for its...

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Modified source/drain re-oxidation method and system

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Modular growth of multiple gate oxides

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Molecular self-assembly in substrate processing

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Monatomic layer passivation of semiconductor surfaces

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MOS transistor and method of manufacture

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Multiple nitrogen plasma treatments for thin SiON dielectrics

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Nitriding method of gate oxide film

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Nitriding method of gate oxide film

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Nitrogen implementation to minimize device variation

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Nitrogen profile in high-K dielectrics using ultrathin...

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ONO fabrication process for increasing oxygen content at...

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Orientation independent oxidation of silicon

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Oxidation in an ambient comprising ozone and the reaction...

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Oxidation method and oxidation system

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Oxidation method and oxidation system

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Oxidation method for semiconductor process

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Oxidation of silicon on germanium

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Oxidation process to improve polysilicon sidewall roughness

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