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Spherical shaped semiconductor integrated circuit

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Spin on glass (SOG) etch improvement method

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Spinner apparatus with chemical supply nozzle and methods of...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Split polysilicon process in CMOS image integrated circuit

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Spray member and method for using the same

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Spray member and method for using the same

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Sputter etch methods

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Sputter PM procedures with polish tool to effectively remove...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Sputter-resistant hardmask for damascene trench/via formation

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Sputtering process for the conformal deposition of a metallizati

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Stabilization of peroxygen-containing slurries used in a...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Stabilization of slurry used in chemical mechanical polishing of

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Stable plasma process for etching of films

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Stacked capacitor having improved charge storage capacity

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Stacked die manufacturing process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Stacked local interconnect structure and method of...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Staining technique for semiconductor device for sem exposure

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Stepped photoresist profile and opening formed using the...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Stepped photoresist profile and opening formed using the...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Stepped upper electrode for plasma processing uniformity

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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