Metal-polishing composition and chemical-mechanical...

Metal/oxide etch after polish to prevent bridging between...

Metallization etching techniques for reducing post-etch...

Metallization process for manufacturing semiconductor devices

Method and apparatus for a gaseous environment providing...

Method and apparatus for anisotropic etching

Method and apparatus for bilayer photoresist dry development

Method and apparatus for chemical polishing using field...

Method and apparatus for chemical-mechanical planarization...

Method and apparatus for chemical/mechanical polishing

Method and apparatus for chemically-mechanically polishing...

Method and apparatus for cleaning by-products from plasma chambe

Method and apparatus for cleaning substrates

Method and apparatus for controlling backside pressure during ch

Method and apparatus for controlling chemical interactions...

Method and apparatus for controlling chemical interactions...

Method and apparatus for controlling chemical interactions...

Method and apparatus for controlling etch selectivity

Method and apparatus for controlling the temperature of a...

Method and apparatus for controlling the temperature of a...