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Multi-beam multi-column electron beam inspection system

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Multi-beam SEM for sidewall imaging

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Multi-column charged particle optics assembly

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Multi-pixel electron emission die-to-die inspection

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Multi-pixel electron emission die-to-die inspection

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Multi-pixel electron emission die-to-die inspection

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Multiple detector system for specimen inspection using high ener

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Multiple electron beam device

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Multipurpose gaseous detector device for electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Nanopillar arrays for electron emission

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Near field optical microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Non-charging critical dimension SEM metrology standard

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Non-destructive root cause analysis on blocked contact or via

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Non-shot-noise-limited source for electron beam lithography...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Object observation apparatus and object observation

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Object observing apparatus and method for adjusting the same

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Objective lens arrangement for use in a charged particle...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Observing a surface using a charged particle beam

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Observing method and its apparatus using electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Optical column for charged particle beam device

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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