Optical column for charged particle beam device

Details Optical column for charged particle beam device Optical column for charged particle beam device

2005-08-30

2005-08-30

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S309000, C250S311000, C250S3960ML, C250S398000, C250S492200, C250S289000

Reexamination Certificate

active

06936817

ABSTRACT:
The invention provides a miniaturized optical column for a charged particle beam apparatus for examining a specimen (14). The column is constituted by, among other things, a charged particle source (2) for providing a beam of charged particles (10); a lens system for guiding the beam of charged particles (10) from the source (2) onto the specimen (14); and a housing (40) which, during operation, is set on beam boost potential.

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patent: WO 99/45565 (1999-09-01), None

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