Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2005-09-13
2005-09-13
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S3960ML, C250S492300, C250S398000
Reexamination Certificate
active
06943351
ABSTRACT:
A multi-column charged particle optics assembly comprises: a first optical component which is continuous through all columns of the charged particle optics assembly; and a multiplicity of independently alignable second optical components coupled to the first optical component, such that there is one second component for each column in the charged particles optics assembly. The first component provides mechanical integrity to the charged particle optics assembly and each second optical component is independently alignable to the optic axis of its corresponding column. In a further embodiment, the charged particle optics assembly comprises: first and second continuous optical components; and a multiplicity of independently alignable electrodes coupled to the second optical component, such that there is a corresponding independently alignable electrode for each column.
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Henricks et al,SPIE, vol. 2439, p. 174.
Galande Victor A.
Miller S. Daniel
Parker N. William
Jaffer David H.
Multibeam Systems, Inc.
Pillsbury Winthrop Shaw & Pittman LLP
Smith II Johnnie L
Wells Nikita
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