Multiple electron beam device

Details Multiple electron beam device Multiple electron beam device

2007-10-16

2007-10-16

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S307000, C250S491100

Reexamination Certificate

active

10491939

ABSTRACT:
The invention provides electron multiple beam devices (1) for probing or structuring a non-transparent specimen (20) with primary electron beams (14) with an array of electron beam sources (3) to generate multiple primary electron beams (14), an electron sensor (12) with electron sensor segments (12a) to detect electrons of the primary electron beams (14) and at least one anode (7) to direct the primary electron beams (14) towards the electron sensor (12). The electron sensor (12) serves to inspect the primary electron beams (14), calibrate the positions of the primary electron beams (14) and possibly adjust final focus length (13) and currents of the primary electron beams before or after a probing or structuring the upper surface (20a) of a non-transparent specimens (20). Further, methods to inspect primary electron beams (14), to adjust final focus lengths (13) and to calibrate the multiple electron beam device (1) are provided.

REFERENCES:
patent: 4494005 (1985-01-01), Shibata et al.
patent: 4721842 (1988-01-01), Farrell
patent: 5122663 (1992-06-01), Chang et al.
patent: 5155412 (1992-10-01), Chang et al.
patent: 5430292 (1995-07-01), Honjo et al.
patent: 5929557 (1999-07-01), Makishima et al.
patent: 5933211 (1999-08-01), Nakasugi et al.
patent: 5969362 (1999-10-01), Kawata et al.
patent: 5977719 (1999-11-01), Makishima
patent: 5981962 (1999-11-01), Groves et al.
patent: 6028662 (2000-02-01), Sturans et al.
patent: 6145438 (2000-11-01), Berglund et al.
patent: 2001/0004185 (2001-06-01), Muraki et al.
patent: 2001/0010362 (2001-08-01), Simizu
patent: 56-83029 (1981-07-01), None
patent: WO 00/67291 (2000-11-01), None
Liu, et al. “Micro-objective lens with compact secondary electron detector for miniature low voltage electron beam systems,” J. Vac. Sci. Technol. B 14(6), Nov./Dec. 1996.
International Preliminary Examination Report, dated Aug. 22, 2003, for PCT/EP02/11135.
International Search Report, dated Feb. 12, 2003, for PCT/EP02/11135.
European Patent Office Search Report, dated Mar. 7, 2002, for EP 01123855.7.
Spindt, “A Thin-Film Field-Emission Cathode,” Journal of Appl. Physics, vol. 39 (1968) No. 7, p. 3404-3505.

Affiliated with

Also associated with

Rating

Multiple electron beam device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multiple electron beam device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multiple electron beam device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3851949