Multipurpose gaseous detector device for electron microscope

Details Multipurpose gaseous detector device for electron microscope Multipurpose gaseous detector device for electron microscope

1989-09-13

1991-02-12

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250306, 250307, H01J 37244

Patent

active

049926624

ABSTRACT:
The invention provides for a scanning electron microscope which detects photons produced by contact between radiation emitted from the surface of a sample and gas molecules of a gaseous medium which surrounds the sample. The invention also provides a method for microscopically imaging the surface of a sample through the use of gaseous photon detection.

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patent: 4365339 (1982-12-01), Pavkovich et al.
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patent: 4720633 (1988-01-01), Nelson
patent: 4785182 (1988-11-01), Mancuso et al.
Danilatos, "A Gaseous Detector Device for an Environmental SEM", Micron and Microscopa Acta 14 (4), pp. 307-318 (1983).
Danilatos, "Design and Construction of an Atmospheric or Environmental SEM"(Part 3), Scanning, vol. 7, 26-42 (1985).
Danilatos, G. D., "Improvements on the Gaseous Detector Device", G.D. Bailey, Ed., Electron Microscopy Society of America, pp. 630-631 (1986).
Danilatos, G.D., "ESEM--A Multipurpose Surface Electron Microscope", G.W. Bailey Ed., Proceedings of the 44th Annual Meeting of the Electron Microscopy Society of America, pp. 632-633 (1986).

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