Object observing apparatus and method for adjusting the same

Details Object observing apparatus and method for adjusting the same Object observing apparatus and method for adjusting the same

1998-03-25

2000-01-04

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 3726

Patent

active

06011262&

ABSTRACT:
The present invention discloses an object observing apparatus comprising a stage for mounting a sample to be observed; a primary optical system, having an electron gun, for emitting a primary irradiation beam to the stage; and a secondary optical system, having an inlet facing the stage, for receiving an electron generated when the sample is irradiated with the primary irradiation beam and forming an image thereof; wherein the secondary optical system comprises an imaging optical system for forming an image of the electron incident thereon, and a field aperture having a plurality of optical patterns and being adapted to selectively attach and detach each optical pattern at a predetermined position or an aperture stop having at least one aperture size and being selectively attachable and detachable.

REFERENCES:
patent: 4978855 (1990-12-01), Liebl et al.
patent: 5498874 (1996-03-01), Miyoshi et al.
patent: 5895916 (1999-04-01), Tsukajima et al.
Tsuno, "Simulation of a Wien filter as beam separator in a low energy electron microscope" Ultramicroscopy 55:127-140 (1994).

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