Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2005-05-24
2005-05-24
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S3960ML, C250S397000, C250S3960ML
Reexamination Certificate
active
06897442
ABSTRACT:
An objective lens arrangement is presented for mounting in a charged particle beam column adjacent to an anode tube that defines a beam drift space for a charged particle beam propagating towards a sample. The lens arrangement comprises a magnetic lens and an electrostatic lens, wherein the electrostatic lens includes upper and lower electrodes arranged in a spaced-apart coaxial relationship along an optical axis of the lens arrangement.
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Frosien, J., et al., “Compound Magnetic And Electrostatic Lenses For Low-Voltage Applications”,Journal of Vacuum Science And Technology: PART B, American Institute of Physics, New York US, vol. 7, No. 6, 18XP000117179, ISSN: 1071-1023, (Nov. 1, 1989), 1871-1877.
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Applied Materials Israel, Ltd.
Blakely & Sokoloff, Taylor & Zafman
Gurzo Paul M.
Lee John R.
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