Objective lens arrangement for use in a charged particle...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type

Reexamination Certificate

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C250S3960ML, C250S397000, C250S3960ML

Reexamination Certificate

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06897442

ABSTRACT:
An objective lens arrangement is presented for mounting in a charged particle beam column adjacent to an anode tube that defines a beam drift space for a charged particle beam propagating towards a sample. The lens arrangement comprises a magnetic lens and an electrostatic lens, wherein the electrostatic lens includes upper and lower electrodes arranged in a spaced-apart coaxial relationship along an optical axis of the lens arrangement.

REFERENCES:
patent: 4926054 (1990-05-01), Frosien
patent: 5895917 (1999-04-01), Ueda et al.
patent: 6037589 (2000-03-01), Yonezawa et al.
patent: 6232601 (2001-05-01), Schmitt et al.
patent: 6407388 (2002-06-01), Frosien
patent: 6590210 (2003-07-01), Essers
patent: WO-9946797 (1999-09-01), None
Frosien, J., et al., “Compound Magnetic And Electrostatic Lenses For Low-Voltage Applications”,Journal of Vacuum Science And Technology: PART B, American Institute of Physics, New York US, vol. 7, No. 6, 18XP000117179, ISSN: 1071-1023, (Nov. 1, 1989), 1871-1877.
Search Report, “International Searching Authority”,PCT/US2004/12468, (Apr. 22, 2004).

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