Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2011-02-08
2011-02-08
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S307000, C250S306000, C250S492200, C250S493100, C250S397000, C250S399000, C257S010000, C977S762000
Reexamination Certificate
active
07884324
ABSTRACT:
The present invention provides systems, devices, device components and structures for modulating the intensity and/or energies of electrons, including a beam of incident electrons. In some embodiments, for example, the present invention provides nano-structured semiconductor membrane structures capable of generating secondary electron emission. Nano-structured semiconductor membranes of this aspect of the present invention include membranes having an array of nanopillar structures capable of providing electron emission for amplification, filtering and/or detection of incident radiation, for example secondary electron emission and/or field emission. Nano-structured semiconductor membranes of the present invention are useful as converters wherein interaction of incident primary electrons and nanopillars of the nanopillar array generates secondary emission. Nano-structured semiconductor membranes of this aspect of the present invention are also useful as directed charge amplifiers wherein secondary emission from a nanopillar array provides gain functionality for increasing the intensity of radiation comprising incident electrons.
REFERENCES:
patent: 4060823 (1977-11-01), Howorth et al.
patent: 4303930 (1981-12-01), Can Gorkom et al.
patent: 5138402 (1992-08-01), Tsukamoto et al.
patent: 5814832 (1998-09-01), Takeda et al.
patent: 6722200 (2004-04-01), Roukes et al.
patent: 7041611 (2006-05-01), Blick et al.
patent: 7408147 (2008-08-01), Blick et al.
patent: 2002/0166962 (2002-11-01), Roukes et al.
patent: 2007/0023621 (2007-02-01), Blick et al.
patent: 199 61 811 (2001-07-01), None
patent: WO 02/12443 (2002-02-01), None
patent: WO 03/095616 (2003-11-01), None
patent: WO 03/095617 (2003-11-01), None
patent: WO 2004/041998 (2004-05-01), None
patent: WO 2007/016113 (2007-02-01), None
Aebersold et al. (Mar. 13, 2003) “Mass Spectrometry-Based Proteomics,”Nature422:198-207.
Armour et al. (2002)“Transport Via a Quantum Shuttle,”Phys. Rev. B66:035333.
Barker et al. (2005)Modern Microwave and Millimeter-Wave Power Electronics, IEEE Press, Wiley, N.J., CH. 4,7,8,15.
Beil et al. (2003) “Comparing Schemes of Displacement Detection and Subharmonic Generation in Nanomachined Mechanical Resonators,”Nanotechnology. 14:799-802.
Beil et al. (2002) “p2-21: Broadband Acoustical Tuning of Nano-Electrochemical Sensors,”Proc. IEEE Sensor1:1285-1289.
Blick et al. (2004) “Nano-Electromechanical Transistor Operated as a Bi-Polar Current Switch,”Proceedings of the 4h IEEE Conference on Nanotechnology, 258-259.
Blick et al. (2003) “A Quantum Electromechanical Device: The Electromechanical Single-Electron Pillar,”Superlatices and Microstructures33(5-6):397-403.
Blick et al. (Dec. 25, 1995) “Photon-Assisted Tunneling Through a Quantum Dot at High Microwave Frequencies,”Appl. Phys. Lett. 67(26):3924.
Blick et al. (Aug. 15, 2002) “Nanostructures Silicon for Studying Fundamental Aspects of Nanomechanics,”J. Phys: Condens. Matter14:R905-R945.
Brattain et al. (Jan. 1953) “Surface Properties of Germainium,”Bell Syst. Tech. J.32:1-41.
Browning et al. (1993) “Atomic-Resolution Chemical Analysis Using a Scanning Transmission Electron Microscope,”Nature366:143-146.
Bruining, H. (1954) “Thin Film Field Emission,” In;Physics and Applications of Secondary Electron Emission, McGraw-Hill Book Co., Inc: New York. pp. 59-63.
Buldum et al. (Dec. 5, 2003) “Electron Field Emission Properties of Closed Carbon Nanotubes,”Phys. Rev. Lett. 91(23):236801.
Crewe et al. (Jun. 12, 1970) “Visibility of Single Atoms,”Science168:1338-1340.
Crewe et al. (Feb. 1969) “A Simple Scanning Electron Microscope,”Rev. Sci. Instrum. 40(2):241-246.
Cruz et al. (2005) “Field Emission Characteristics of a Tungsten Microelectromechanical System Device,”Appl. Phys. Lett. 86(153502):1-3.
Deshmukh et al. (Sep. 13, 1999) “Nanofabrication Using a Stencil Mask,”Appl. Phys. Lett.75(11):1631-1633.
Driskill-Smith et al. (Nov. 24, 1997) “Nanoscale Field Emission Structures for Ultra-Low Voltage Operation at Atmospheric Pressure,”Appl. Phys. Lett. 71(21):3159-3161.
Driskill-Smith (Nov./Dec. 1997) “Fabrication and Behavior of Nanoscale Field Emission Structures,”J. Vac. Sci. Technol. B15(6):2773-2776.
Driskill-Smith et al. (Nov. 1, 1999) “The ‘Nanotriode’: A Nanoscale Field-Emission Tube,”Appl. Phys. Lett. 75(18):2845-2847.
Ekinci et al. (May 31, 2004) Ultrasensitive Nanoelectromechanical Mass DetectionAppl. Phys. Lett. 84(22):4469-4471.
Erbe et al. (Nov. 6, 2000) “Mechanical Mixing in Nonlinear Nanomechanical Resonators,”Appl. Phys. Lett. 77(19):3102-3104.
Forbes et al. (Mar./Apr.1999) “Field-Emission: New Theory for the Derivation of Emission Area from a Fowler—Nordheim Plot,”J. Vac. Sci Technol. B17(2):526-533.
Fursey, G. (2005)“Mass-Spectrometers with Field Emission Cathodes,” In;Field Emission in Vacuum Microelectronics, Kluwer Academic/Plenum Publishers, New York, pp. 159-160.
Geis et al. (Jun. 14, 1998) “A New Surface Electron-Emission Mechanism in Diamond Cathodes,”Nature393:431-435.
Huang et al. (Jan. 30, 2003) “Nanoelectromechanical Systems: Nanodevice Motion at Microwave Frequencies,”Nature421:496.
Ilic et al. (2005) “Enumeration of DNA Molecules Bound to a Nanomechanical Oscillator,”Nano Lett. 5(5):925-929.
International Search Report and Written Opinion, Corresponding to International Application No. PCT/US06/28888, Mailed Jul. 11, 2008.
Jensen et al. (Jul./Aug. 1998) “Advanced Emitters for Next Generation of Amplifiers,”J. Vac. Sci. Technol. B16(4):2038-2048.
Jensen et al (Jul. 15, 1997) “Space Charge Effects on the Current-Voltage Characteristics of Gated Field Emitter Arrays,”J. Appl. Phys. 82(2):845-854.
Johnson et al. (Feb. 15, 1954) “Secondary Electron Emission from Germanium,” Phys. Rev. 93(4):668-672.
Kamiya et al. (Sep. 29, 1997) “Secondary Electron Emission from Boron-Doped Diamond Under Ion Impact: Applications in Single-Ion Detection,”Appl. Phys. Lett. 71(13):1875-1877.
Kanter, H. (Feb. 1, 1961) “Energy Dissipation and Secondary Electron Emission in Solids,”Phys. Rev. 121(3):677-681.
Kim et al. (Sep. 20, 2004) “Bonding Silicon-on-Insulator to Glass Wafers for Integrated Bio-electronic Circuits,”Appl. Phys. Lett. 85:2370-2372.
Kim et al. (Feb. 14, 2007) “Field Emission from a Single Nanomechanical Pillar,”Nanotechnology18(6):065201.
Kirschbaum et al. (Jul. 8, 2002) “Integrating Suspended Quantum Dot Circuits for Applications in Nanomechanics,”Appl. Phys. Lett. 81:280-282.
Koenig et al. (Jul. 5, 2004) “Drastic Enhancement of Nanoelectromechanical-System Fabrication Yield Using Electron-Beam Deposition,”Phys. Lett. 85(1):157-159.
Koops et al. (Nov./Dec. 1996) “Conductive Dots, Wires, and Supertips for Field Electron Emitters Produced by Electron-Beam Induced Deposition on Samples Having Increased Temperature,”J. Vac. Sci. Technol. B14(6):4105-4109.
Koops et al. (Jan./Feb. 1988) “High-Resolution Electron-Beam Induced Deposition,”J. Vac. Sci. Technol. B6(1):477-481.
Kraus et al. (2000) “Nanomechanical Vibrating Wire Resonator for Phonon Spectroscopy in Liquid Helium,”Nanotechnol. 11(3):165-168.
Liu et al. (2000) “Optically Excited Electron Emission from Silicon Filed Emitter Arrays,”Pacific Rim Conference on Lasers and Electro-Optics, CLEO-Technical Digestpp. 352-353.
Molares et al. (Mar. 31, 2003) “Electrical Characterization of Electrochemically Grown Single Copper Nanowires,”Appl. Phys. Lett. 82(13):2139-2141.
Nguyen, C.T.-C. (Aug. 1999) “Frequency-Selective MEMS for Miniaturized Low-Power Communication Devices,”IEEE Trans. Microwave Theory Tech. 47(8):1486-1503.
Nojeh et
Blick Robert H.
Qin Hua
Smith Lloyd M.
Westphall Michael S.
Greenlee Sullivan P.C.
Wells Nikita
Wisconsin Alumni Research Foundation
LandOfFree
Nanopillar arrays for electron emission does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Nanopillar arrays for electron emission, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Nanopillar arrays for electron emission will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2642944