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Electron-beam writing device and electron-beam writing method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Electron-optical system and inspection method using the same

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Electronic beam device for projecting an image of an object on a

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Electronic microscope observation system and observation method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Electrostatic charge reduction of photoresist pattern on...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Element-specific X-ray fluorescence microscope and method of...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Emission electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Energy dispersive X-ray analyzer

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Energy dispersive X-ray spectrometer

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Energy filtering for electron back-scattered diffraction pattern

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Energy-dispersive X-ray detector

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Environmental scanning electron microcope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Environmental scanning electron microcope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Environmental scanning electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Environmental scanning electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Environmental SEM with a magnetic field for improved...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Environmental SEM with a multiple fields for improved...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Equipment and process for quantitative x-ray analysis and medium

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Fast scanning electron microscope (FSEM)

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Field emission electron gun

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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