Energy dispersive X-ray spectrometer

Details Energy dispersive X-ray spectrometer Energy dispersive X-ray spectrometer

1990-11-20

1991-11-12

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, G01N 2304

Patent

active

050650203

ABSTRACT:
An energy dispersive X-ray spectrometer used in combination with an electron microscope is disclosed, in which the energy of an electron beam of the electron microscope, with which a sample is irradiated, is determined exactly by detecting the disappearance point of the energy dispersive X-ray spectra on the high energy side, this energy of the irradiation electron beam thus determined being used as a parameter in a calculation for the quantitative energy dispersive X-ray analysis.

REFERENCES:
patent: 4885465 (1989-12-01), Nagatsuka et al.
patent: 4894541 (1990-01-01), Ono
patent: 4988872 (1991-01-01), Nagatsuka et al.
"Scanning Electron Microanalyzer and X-Ray Microanalysis" Edited by Joseph I. Goldstein et al., 1981, pp. 222-273.

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