Electronic beam device for projecting an image of an object on a

Details Electronic beam device for projecting an image of an object on a Electronic beam device for projecting an image of an object on a

1987-04-13

1989-01-17

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250396R, 2504922, 250396ML, G01N 2300

Patent

active

047989530

ABSTRACT:
An electronic beam device is provided for projecting the image of an object on a sample, including two electromagnetic lens reduction stages. A single insulating tube is disposed between an object and the same plane, this tube having an inner metallized face.

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patent: 4508967 (1985-04-01), Boissel et al.
patent: 4675524 (1987-06-01), Frosien et al.
patent: 4701623 (1987-10-01), Beasley

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