Equipment and process for quantitative x-ray analysis and medium

Details Equipment and process for quantitative x-ray analysis and medium Equipment and process for quantitative x-ray analysis and medium

1997-05-09

1999-02-02

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, G01N 23225, H01J 37256

Patent

active

058669035

ABSTRACT:
This invention provides a quantitative X-ray analyzing system and process for scanning a sample with a beam of radiation includes an X-ray detector for detecting characteristic X-rays generated when a sample is scanned. A computer processor for processing outputs of the X-ray detector to determine concentration values of elements in the sample corresponding to a scanned pixel position of the sample. A memory stores the concentration values and the processor can then map the elements in background for phase analysis and grouping of the elements in the background by composition based on the contents of the memory wherein each map point is quantitatively operated to find a determined value of each group and in addition the area ratio of each group is found, and then, based on the density of the detected elements and to determine the value of each group, an area ratio is converted to a weight ratio for each group.

REFERENCES:
patent: 5596195 (1997-01-01), Obori et al.

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