Energy filtering for electron back-scattered diffraction pattern

Details Energy filtering for electron back-scattered diffraction pattern Energy filtering for electron back-scattered diffraction pattern

1995-02-27

1996-07-16

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, 250305, H01J 3705, H01J 3729

Patent

active

055369405

ABSTRACT:
A sample to be analyzed by a scanning electron microscope is held at an electrostatic potential higher than the recording plate of the microscope. This provides that electrons scattered from the sample which are at an energy level lower than a chosen level are drawn back into the sample by the potential of the sample, while other, higher energy scattered electrons reach the recording plate to form a pattern thereon.

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patent: 5264704 (1993-11-01), Phang et al.
James F. Mancuso et al., "Effect of Energy Filtering on Micro-Diffraction in the SEM", Proceedings Fifty-Second Annual Meeting Microscopy Society of America Twenty-Ninth Annual Meeting Microbeam Analysis Society, 31 Jul.-5 Aug. 1994, San Francisco Press, Inc.
L. Reimer, "Energy-Filtering Transmission Electron Microscopy in Materials and Life Science", Prodeedings Fifty-Second Annual Meeting Microscopy Society of America Twenty-Ninth Annual Meeting Microbeam Analysis Society, 31 Jul.-5 Aug. 1994, San Francisco Press, Inc.

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