Fast scanning electron microscope (FSEM)

Details Fast scanning electron microscope (FSEM) Fast scanning electron microscope (FSEM)

1992-10-19

1993-10-19

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250396ML, H01J 3728

Patent

active

052548570

ABSTRACT:
High magnification and large depth of field with a temporal resolution of less than 100 microseconds are possible using the present invention which combines a linear electron beam produced by a tungsten filament from an SX-40A Scanning Electron Microscope (SEM), a magnetic deflection coil with lower inductance resulting from reducing the number of turns of the saddle-coil wires, while increasing the diameter of the wires, a fast scintillator, photomultiplier tube, photomultiplier tube base, and signal amplifiers and a high speed data acquisition system which allows for a scan rate of 381 frames per second and 256.times.128 pixel density in the SEM image at a data acquisition rate of 25 MHz. The data acquisition and scan position are fully coordinated. A digitizer and a digital waveform generator which generates the sweep signals to the scan coils run off the same clock to acquire the signal in real-time.

REFERENCES:
patent: 3671743 (1972-06-01), Nixon
patent: 4180738 (1979-12-01), Smith et al.
patent: 4434371 (1984-02-01), Knauer
patent: 4476386 (1984-10-01), Reid et al.
patent: 4713687 (1987-12-01), Shimizu et al.
patent: 4789781 (1988-12-01), Kitagawa et al.

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