Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1992-07-02
1993-12-14
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
25037015, 250399, H01J 37244, H01J 3726
Patent
active
052705447
ABSTRACT:
An X-ray detector used in an energy-dispersive X-ray spectrometer The detector comprises a cooling vessel containing liquid nitrogen and a protective container enclosing the cooling vessel. The space between the cooling vessel and the protective container is hermetically partitioned into a dewar tank portion and a nose portion by a partition wall. An X-ray detector device is accommodated in the nose portion. If the liquid nitrogen inside the cooling vessel evaporates, the produced gas stays only inside the dewar tank portion and does not enter the nose portion.
REFERENCES:
patent: 3812288 (1974-05-01), Walsh et al.
patent: 4851684 (1989-07-01), Martin et al.
patent: 4910399 (1990-03-01), Taira et al.
Anderson Bruce C.
Jeol Ltd.
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