Environmental scanning electron microcope

Details Environmental scanning electron microcope Environmental scanning electron microcope

2008-04-29

2008-04-29

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S309000, C250S311000

Reexamination Certificate

active

11354067

ABSTRACT:
In an environmental scanning electron microscope in which differential pumping for maintaining the pressure ratio between an electron optical system and a specimen chamber at a predetermined value is effected and a probe electric current is conditioned to meet a predetermined or more value so as to permit observation of uncooked food and moist specimens in low vacuum, there are provided three stages of objective apertures used as apertures for an objective lens for an electron beam in the electron optical system and used also as orifices for differential pumping for maintaining the pressure ratio between the electron optical system and the specimen chamber at a predetermined value. Then, a deflection fulcrum of the electron beam in the electron optical system is set at a mid stage of the three-stage objective aperture.

REFERENCES:
patent: 5008537 (1991-04-01), Toita et al.
patent: 5362964 (1994-11-01), Knowles et al.
patent: 5412211 (1995-05-01), Knowles
patent: 6583413 (2003-06-01), Shinada et al.
patent: 7098455 (2006-08-01), Shinada et al.
patent: 2005/0029467 (2005-02-01), Yu et al.
patent: 2007/0215803 (2007-09-01), Iwabuchi et al.
patent: 01-183047 (1989-07-01), None
patent: 2000-156192 (2000-06-01), None

Affiliated with

Also associated with

Rating

Environmental scanning electron microcope does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Environmental scanning electron microcope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Environmental scanning electron microcope will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3956897