Environmental scanning electron microscope

Details Environmental scanning electron microscope Environmental scanning electron microscope

1994-06-03

1995-05-02

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 37256, H01J 37244

Patent

active

054122112

ABSTRACT:
An environmental scanning electron microscope which achieves image resolution comparable to that of a conventional SEM. A biased ring electrode which detects secondary electron signals emanating from the surface of the specimen is provided in the specimen chamber. A biased pressure limiting aperture electron detector is also provided to reduce signals emanating from backscattered electrons and to reduce signal noise generated by the electron beam. This environmental SEM also optimizes the signal amplification of the secondary electrons following detection thereof, such that the detector noise is reduced below the noise in the signal itself, while still maintaining an overall bandwidth that is suitable for setting up the image. An optical window system is also provided in this environmental SEM which allows the user to easily switch between the normal environmental SEM electron image (limited to 0.5 mm in diameter) to an optical light view of the sample that covers a field-of-view of up to about 7 to 10 mm. Moreover, the construction of this environmental SEM provides for a take-off angle for the X-ray detectors (EDX detectors) which is comparable to the take-off angle in for an EDX detector in a conventional SEM. Additionally, the arrangement of the scanning coils and magnetic focusing lens in this environmental SEM provides for an enhanced field-of-view of the specimen.

REFERENCES:
patent: Re27005 (1970-12-01), Wingfield et al.
patent: 2899556 (1959-08-01), Schopper et al.
patent: 2908821 (1959-10-01), Schumacher
patent: 2928943 (1960-03-01), Bartz et al.
patent: 2991362 (1961-07-01), Schumacher
patent: 3155827 (1964-11-01), Nixon
patent: 3248542 (1966-04-01), Nixon
patent: 3509335 (1970-04-01), Nixon
patent: 3612859 (1971-10-01), Schumacher
patent: 3629579 (1971-12-01), Naitou
patent: 3720633 (1988-01-01), Nelson
patent: 3761709 (1973-09-01), Hasegawa et al.
patent: 3885157 (1975-05-01), Heinemann
patent: 3958124 (1976-05-01), Koch et al.
patent: 4066905 (1978-01-01), Dassler et al.
patent: 4071766 (1978-01-01), Kalman et al.
patent: 4121100 (1978-10-01), Kubozoe et al.
patent: 4233509 (1980-11-01), Tamura et al.
patent: 4306149 (1981-12-01), Le Poole et al.
patent: 4410272 (1983-10-01), Beauvineau et al.
patent: 4537477 (1985-08-01), Takagi et al.
patent: 4596928 (1986-06-01), Danilatos
patent: 4720633 (1988-01-01), Nelson
patent: 4727029 (1988-02-01), Mori
patent: 4740698 (1988-04-01), Tamura et al.
patent: 4785182 (1988-11-01), Mancuso et al.
patent: 4798989 (1989-01-01), Miyazaki et al.
patent: 4823006 (1989-04-01), Danilatos et al.
patent: 4860224 (1989-08-01), Cashell et al.
patent: 4874945 (1989-10-01), Ohi
patent: 4880976 (1989-11-01), Mancuso et al.
patent: 4992662 (1991-02-01), Danilatos
patent: 5023452 (1991-06-01), Purcell et al.
patent: 5081353 (1992-01-01), Yamada et al.
patent: 5097134 (1992-03-01), Kimoto et al.
patent: 5122663 (1992-06-01), Chang et al.
patent: 5200616 (1993-04-01), Kokawa et al.
Danilatos, "A gaseous Detector Device for an Environmental SEM", Micron and Microscope Acta 14(4), pp. 307-318 (1983).
Danilatos, "Design and Construction of an Atmospheric or Environmental SEM", (Part 3), Scanning, vol. 7, 26-42 (1985).
Danilatos, G. D., "Improvements of the Gaseous Detector Device" G. D. Bailey, Ed. Proceedings of the 44th Annual Meeting of the Electron Microscopy of America, pp. 630-631 (1986).
Danilatos, G. D., "ESSM--A Multipurpose Surface Electron Microscope," G. W. Bailey, Ed., Proceeding of the 44th Annual Meeting of the Electron Microscopy Society of America, pp. 632-633 (1986).
Danilatos, G. D. et al., "Principles of Scanning Electron Microscopy at High Specimen Chamber Pressures," Scanning, vol. No. 2, 1979, pp. 72-82.

Affiliated with

Also associated with

Rating

Environmental scanning electron microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Environmental scanning electron microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Environmental scanning electron microscope will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1139268